Item ID: 260582 1 Offered at Best Price Trikon Sigma FxP200 RevA mit MX800 Platform It´s a Trikon Sigma FxP200 with 4 Std RevA DEP Chambers, 1 RevA HSE (not complete),1 MKII Heat Chamber. Brooks MX800 Platform with 2 Swing Out VCE6 Loadlocks. ThePlatform is upgradet from T5 Controller (MX800) to GTM with PC104 Controller. All DEP Chambers HSE and Transport has CTI Onboard 8F Cryos and 2 9600 Cryo Compressor. No Forline Pumps ... other images Unit Price Unstated Number of Units 1 Manufacturer Trikon Tech Ltd. Model Sigma FxP200 RevA Description Trikon/SPTS PVD Tool Wafer Size Range Minimum 200 mm Maximum 200 mm Set Size 200 mm Accessories Brooks MX800 Platform with 2 VCE6 Loadlocks, 4 Std. RevA DEP, 1 RevA HSE, 1 MKII Heat. 2CTI 9600 HV Cryo Compressor Other Information Brooks MKII Platform upgradet to SPTS GTM PC104 Extended Description Details at Konfiguration SPUT39.xlsx Condition Good Year of Manufacture 1999 Power Requirements 380 V 50 Hz 3 Phase Serial Number(s)F811 Shipping & Handling:All items are sold on condition `as is and where is`. Ex work from current location excluding de-installation, de-hook up, discharge, packaging, crating and delivery. We are not responsible for any damage incurred during shipment. Payment:100% downpayment Make OFFERSend QUESTIONS
It´s a Trikon Sigma FxP200 with 4 Std RevA DEP Chambers, 1 RevA HSE (not complete),
1 MKII Heat Chamber. Brooks MX800 Platform with 2 Swing Out VCE6 Loadlocks. The
Platform is upgradet from T5 Controller (MX800) to GTM with PC104 Controller. All DEP Chambers HSE and Transport has CTI Onboard 8F Cryos and 2 9600 Cryo Compressor. No Forline Pumps
Brooks MX800 Platform with 2 VCE6 Loadlocks, 4 Std. RevA DEP, 1 RevA HSE, 1 MKII Heat.
2CTI 9600 HV Cryo Compressor
Brooks MKII Platform upgradet to SPTS GTM PC104
All items are sold on condition `as is and where is`. Ex work from current location excluding de-installation, de-hook up, discharge, packaging, crating and delivery. We are not responsible for any damage incurred during shipment.
ALL CATEGORIES Silicon Preparation Production Eq
Log in