| Equipment Konfiguration: | |
| Type: | NV8250HT |
| Energy Config: | 0 - 250Kv Midcurrent |
| Serialnumber: | 908 |
| Build Year: | 2002 |
| Date of first usage: | buyed new from vendor |
| Current Condition: | Good |
| CE-Conformity: | Yes |
| Location: | greyroom |
| Voltage: | 208V |
| Cryo-Pumps: | 3x CTI/Edwards Onboard: OB-8 |
| Cryo-Kompressor: | CTI 9650 Low-Voltage |
| Turbo-Pumps: | Seiko/Edwards: STP1003C, STP-301C, STP-1003C |
| Rough-Pumps: | Edwards: without QDP40, not included |
| Endstation Rough-Pump: | not included |
| Wafersize: | 8inch(200mm) |
| Clamp-Type: | E-Chuck green with Non-µC Controller |
| Wafer-Cooling: | Galden HT110 with Affinity PWC-020K-BE35CBD2 (R507) (condition unclear) |
| Gasbox: | Modular 5-String, 4x 2,0L Size |
| String1: | Argon Carriergas; MFC Unit-1662 2sccm BF3 |
| String2: | BF3 SDS-Low-Pressure Type VCR 1/4"; MFC Unit-1662 2sccm BF3 |
| String3: | condition unclear, Type VCR 1/4" MFC Unit-1662 2sccm BF3 |
| String4: | AsH3 SDS-Low-Pressure Type VCR 1/2"; MFC Unit-1662 2sccm BF3 |
| String5: | PH3 SDS-Low-Pressure Type VCR 1/2"; MFC Unit-1662 2sccm BF3 |
| Beam-Profiler Type: | Belt-Drive |
| Gear-Type's: | Scan: Planetary Tilt: Planetary |
| Source-Type: | ELS4 IHC-Source without Vaporizer |
| HV-Transformer: | Silicon-Oil |
| Light-Tower: | red/yellow/green; no buzzer |
| Main-Workstation | Solaris SUN AXI 3HE (Special case) |
| Second-Workstation | Solaris SUN Sparc5 |
| Software-Version: | 5.1.4.1 |
| Network: | 24port 100MB Ethernet with Cisco Router-Kit |
| Cell-Controller: | 177 Type |
| Notes: | Upper-Rack Panel missing |
| | Clean-Room Table missing on frontside |
| | all 4 wheels on oil-isolation transformer are broken |
| | Minor modifications on tool |
| | No Manual-Set/ no Spares include |
| | tool was used 24/7 full in production between 15 and 230kv Energy |
| | If required, tool can be inspected on site, but no Power |
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