Item ID: 256348 1 Offered at Best Price WETV18-04 SP304 consisting of the main unit, 3 chemical cabinets and sub-equipment ... other images Unit Price Unstated Number of Units 1 Manufacturer LAM Research Corp. Model WETV18-04 Description SEZ 304 Wafer Size Range Minimum 150 mm Maximum 300 mm Set Size 300 mm Number of Robots 1 Position 1 Tank Material PVDF Position 2 Tank Material PVDF Position 3 Tank Material PVDF Position 4 Tank Material PVDF Automatic Wafer Transfer YES Controller Type Microprocessor Controller Type Other Information the system was configured by LAM to allow the chemicals to be pumped up to the cabinets (intermediate tanks for all three media - see photos) and the attached flow plan (no return pumps in the cabinet!). Inline heater for media and DI Main unit: 12-inch system with handler/gripper with flip option; Pinchuck Intermediate tanks with Trebor pumps Levitronix flow meters for heater flow sometimes cause problems FFU was converted to a different controller/fan (see photos) Chemistry cabinets: Cabinet 1: Main tank (40L) with buffer tank and buffer function Cabinet 2: Main tank (40L) with buffer tank and buffer function Cabinet 3: Pre-tank with 3 paddlewheels/counter and mix pump and main tank (40L) with buffer tank and buffer function The chemistry computer motherboard was replaced with a different one A weld on the drain in Chemistry Cabinet 3 was repaired Extended Description Details at SP304_Chem_Flowplan.pdf Year of Manufacture 2016 Condition Good Power Requirements Other V 80.0 A CE Marked YES Serial Number(s)669 Shipping & Handling:All items are sold on condition `as is and where is`. Ex work from current location excluding de-installation, de-hook up, discharge, packaging, crating and delivery. We are not responsible for any damage incurred during shipment. Payment:100% downpayment Make OFFERSend QUESTIONS
consisting of the main unit, 3 chemical cabinets and sub-equipment
the system was configured by LAM to allow the chemicals to be pumped up to the cabinets (intermediate tanks for all three media - see photos) and the attached flow plan (no return pumps in the cabinet!). Inline heater for media and DI Main unit: 12-inch system with handler/gripper with flip option; Pinchuck Intermediate tanks with Trebor pumps Levitronix flow meters for heater flow sometimes cause problems FFU was converted to a different controller/fan (see photos) Chemistry cabinets: Cabinet 1: Main tank (40L) with buffer tank and buffer function Cabinet 2: Main tank (40L) with buffer tank and buffer function Cabinet 3: Pre-tank with 3 paddlewheels/counter and mix pump and main tank (40L) with buffer tank and buffer function The chemistry computer motherboard was replaced with a different one A weld on the drain in Chemistry Cabinet 3 was repaired
All items are sold on condition `as is and where is`. Ex work from current location excluding de-installation, de-hook up, discharge, packaging, crating and delivery. We are not responsible for any damage incurred during shipment.
ALL CATEGORIES Silicon Preparation Production Eq Wafer Cleaners
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