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Offered at
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CANON 5500iZ
still in production, deinstallation date 01.02.25 1) no harddisk in stepper Workstation (EWS) installed: backup of stepper system parameter available 2) No Hg-lamp installed 3) No UPS unit installed. 4) all batteries, C-oil and cooling fluid will be removed before shipping because of safety regulations 5) no MO drive installed - wafer handling and wafer chuck configured for 12" wafer processing - SMIF pod reticle changer - 6" reticle size
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