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FULL DESCRIPTION of Item 239336

in Epitaxial Cluster Tools
Item ID: 239336

Offered 1 Offered at Best Price


AMAT Centura EPI 8 Zoll

The system was completely overhauled by us with external service AMAT on site at that time!; Blower controls upgraded every 3 chambers; Approximately 4 years ago the Complete Gas Cabinet was upgraded from Legaty to Universal Gas Cabinet on site with the FA. AMAT upgraded costs €0.5 million; The facility has proprietary Modorized Lift 3x;

 

 

AMAT Centura EPI 8 Zoll
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Unit Price Unstated
Number of Units 1
Manufacturer AMAT
Model Centura EPI 8 inch
Wafer Size Range 
  Minimum 200 mm
  Maximum 200 mm
  Set Size 200 mm
Number of Chambers 3
Chamber 1 Description 

White Body Cassettes; 1xprocess chamber Std. EPI; 2x poly chambers; vita controller; 3xModorized Rotation/Lift Infineon homemade; new upgraded blower controls;

Chamber 2 Description 

White Body Cassettes; 1xprocess chamber Std. EPI; 2x poly chambers; vita controller; 3xModorized Rotation/Lift Infineon homemade; new upgraded blower controls;

Chamber 3 Description 

White Body Cassettes; 1xprocess chamber Std. EPI; 2x poly chambers; vita controller; 3xModorized Rotation/Lift Infineon homemade; new upgraded blower controls; 

Power Requirements 480 V     300.0 A     3 Phase
Year of Manufacture 2000
Condition Excellent
Serial Number(s)2484

Shipping & Handling:

All items are sold on condition `as is and where is`. Ex work from current location excluding de-installation, de-hook up, discharge,  packaging, crating and delivery. We are not responsible for any damage incurred during shipment.

 
Payment:

100% downpayment